{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2561, "q": 20.89, "mu": 2.143, "epsilonL": 1.433e-06, "Eth": 32.08}, "E_min": 32.08, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
32.08	0.0	
37.81	6.747e-05	
44.56	0.0004213	
52.5	0.001424	
61.87	0.003743	
72.91	0.008558	
85.92	0.01784	
101.3	0.03467	
119.3	0.06339	
140.6	0.1092	
165.7	0.177	
195.3	0.269	
230.1	0.3832	
271.1	0.5135	
319.5	0.6526	
376.5	0.7945	
443.7	0.9359	
522.9	1.076	
616.2	1.217	
726.1	1.36	
855.7	1.506	
1008.0	1.658	
1188.0	1.817	
1400.0	1.983	
1650.0	2.158	
1944.0	2.341	
2291.0	2.534	
2700.0	2.736	
3182.0	2.948	
3750.0	3.169	
4419.0	3.398	
5207.0	3.636	
6136.0	3.881	
7231.0	4.133	
8521.0	4.391	
10040.0	4.653	
11830.0	4.919	
13940.0	5.187	
16430.0	5.456	
19360.0	5.723	
22820.0	5.988	
26890.0	6.248	
31690.0	6.501	
37340.0	6.745	
44000.0	6.978	
51860.0	7.198	
61110.0	7.401	
72010.0	7.587	
84860.0	7.752	
-----