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Plasma-Surface Interaction Data Set 274

Sputtering of 3He+ on Co(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Co(pc) at 300 K

angle = 0.0 deg E /eV P
33.410.0
39.340.00058
46.320.002055
54.540.004717
64.220.008925
75.620.01494
89.030.02278
104.80.0321
123.40.04229
145.30.0526
171.10.0624
201.50.07132
237.20.0792
279.30.08604
328.90.09195
387.30.09704
456.00.1014
536.90.1052
632.20.1084
744.40.1111
876.40.1133
1032.00.115
1215.00.1162
1431.00.1169
1685.00.1171
1983.00.1168
2335.00.1159
2750.00.1144
3238.00.1125
3812.00.1099
4489.00.1069
5285.00.1035
6223.00.09956
7327.00.0953
8628.00.09074
10160.00.08595
11960.00.08099
14080.00.07594
16580.00.07086
19530.00.06581
22990.00.06085
27070.00.05602
31870.00.05138
37530.00.04694
44190.00.04273
52030.00.03876
61260.00.03506
72130.00.03161
84930.00.02843

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 33.41 – 100000