{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"33.41": {"P": 0}, "39.34": {"P": 0.00058}, "46.32": {"P": 0.002055}, "54.54": {"P": 0.004717}, "64.22": {"P": 0.008925}, "75.62": {"P": 0.01494}, "89.03": {"P": 0.02278}, "104.8": {"P": 0.0321}, "123.4": {"P": 0.04229}, "145.3": {"P": 0.0526}, "171.1": {"P": 0.0624}, "201.5": {"P": 0.07132}, "237.2": {"P": 0.0792}, "279.3": {"P": 0.08604}, "328.9": {"P": 0.09195}, "387.3": {"P": 0.09704}, "456.0": {"P": 0.1014}, "536.9": {"P": 0.1052}, "632.2": {"P": 0.1084}, "744.4": {"P": 0.1111}, "876.4": {"P": 0.1133}, "1032.0": {"P": 0.115}, "1215.0": {"P": 0.1162}, "1431.0": {"P": 0.1169}, "1685.0": {"P": 0.1171}, "1983.0": {"P": 0.1168}, "2335.0": {"P": 0.1159}, "2750.0": {"P": 0.1144}, "3238.0": {"P": 0.1125}, "3812.0": {"P": 0.1099}, "4489.0": {"P": 0.1069}, "5285.0": {"P": 0.1035}, "6223.0": {"P": 0.09956}, "7327.0": {"P": 0.0953}, "8628.0": {"P": 0.09074}, "10160.0": {"P": 0.08595}, "11960.0": {"P": 0.08099}, "14080.0": {"P": 0.07594}, "16580.0": {"P": 0.07086}, "19530.0": {"P": 0.06581}, "22990.0": {"P": 0.06085}, "27070.0": {"P": 0.05602}, "31870.0": {"P": 0.05138}, "37530.0": {"P": 0.04694}, "44190.0": {"P": 0.04273}, "52030.0": {"P": 0.03876}, "61260.0": {"P": 0.03506}, "72130.0": {"P": 0.03161}, "84930.0": {"P": 0.02843}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1762, "q": 0.3, "mu": 1.452, "epsilonL": 0.0001761, "Eth": 33.41}, "E_min": 33.41, "E_max": 100000}}]}