{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1762, "q": 0.3, "mu": 1.452, "epsilonL": 0.0001761, "Eth": 33.41}, "E_min": 33.41, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
33.41	0.0	
39.34	0.00058	
46.32	0.002055	
54.54	0.004717	
64.22	0.008925	
75.62	0.01494	
89.03	0.02278	
104.8	0.0321	
123.4	0.04229	
145.3	0.0526	
171.1	0.0624	
201.5	0.07132	
237.2	0.0792	
279.3	0.08604	
328.9	0.09195	
387.3	0.09704	
456.0	0.1014	
536.9	0.1052	
632.2	0.1084	
744.4	0.1111	
876.4	0.1133	
1032.0	0.115	
1215.0	0.1162	
1431.0	0.1169	
1685.0	0.1171	
1983.0	0.1168	
2335.0	0.1159	
2750.0	0.1144	
3238.0	0.1125	
3812.0	0.1099	
4489.0	0.1069	
5285.0	0.1035	
6223.0	0.09956	
7327.0	0.0953	
8628.0	0.09074	
10160.0	0.08595	
11960.0	0.08099	
14080.0	0.07594	
16580.0	0.07086	
19530.0	0.06581	
22990.0	0.06085	
27070.0	0.05602	
31870.0	0.05138	
37530.0	0.04694	
44190.0	0.04273	
52030.0	0.03876	
61260.0	0.03506	
72130.0	0.03161	
84930.0	0.02843	
-----