Return to search

Plasma-Surface Interaction Data Set 272

Sputtering of D+ on Co(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Co(pc) at 300 K

angle = 0.0 deg E /eV P
42.161.475e-29
49.410.0002159
57.90.0009102
67.850.002313
79.510.004669
93.180.008107
109.20.0125
128.00.01744
149.90.02238
175.70.02687
205.90.03068
241.30.03375
282.80.03617
331.40.03805
388.30.03948
455.10.04056
533.30.04133
625.00.04185
732.40.04213
858.30.0422
1006.00.04205
1179.00.0417
1381.00.04116
1619.00.04042
1897.00.0395
2223.00.03841
2605.00.03716
3052.00.03577
3577.00.03426
4192.00.03265
4912.00.03096
5757.00.02922
6746.00.02744
7905.00.02566
9264.00.02388
10860.00.02214
12720.00.02044
14910.00.0188
17470.00.01723
20470.00.01574
23990.00.01433
28120.00.013
32950.00.01177
38610.00.01063
45250.00.009569
53030.00.008597
62140.00.007706
72820.00.006894
85330.00.006156

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.16 – 100000