{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on Co(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2832, "q": 0.1085, "mu": 1.686, "epsilonL": 0.0003685, "Eth": 42.16}, "E_min": 42.16, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
42.16	1.475e-29	
49.41	0.0002159	
57.9	0.0009102	
67.85	0.002313	
79.51	0.004669	
93.18	0.008107	
109.2	0.0125	
128.0	0.01744	
149.9	0.02238	
175.7	0.02687	
205.9	0.03068	
241.3	0.03375	
282.8	0.03617	
331.4	0.03805	
388.3	0.03948	
455.1	0.04056	
533.3	0.04133	
625.0	0.04185	
732.4	0.04213	
858.3	0.0422	
1006.0	0.04205	
1179.0	0.0417	
1381.0	0.04116	
1619.0	0.04042	
1897.0	0.0395	
2223.0	0.03841	
2605.0	0.03716	
3052.0	0.03577	
3577.0	0.03426	
4192.0	0.03265	
4912.0	0.03096	
5757.0	0.02922	
6746.0	0.02744	
7905.0	0.02566	
9264.0	0.02388	
10860.0	0.02214	
12720.0	0.02044	
14910.0	0.0188	
17470.0	0.01723	
20470.0	0.01574	
23990.0	0.01433	
28120.0	0.013	
32950.0	0.01177	
38610.0	0.01063	
45250.0	0.009569	
53030.0	0.008597	
62140.0	0.007706	
72820.0	0.006894	
85330.0	0.006156	
-----