{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Co", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"42.16": {"P": 1.475e-29}, "49.41": {"P": 0.0002159}, "57.9": {"P": 0.0009102}, "67.85": {"P": 0.002313}, "79.51": {"P": 0.004669}, "93.18": {"P": 0.008107}, "109.2": {"P": 0.0125}, "128.0": {"P": 0.01744}, "149.9": {"P": 0.02238}, "175.7": {"P": 0.02687}, "205.9": {"P": 0.03068}, "241.3": {"P": 0.03375}, "282.8": {"P": 0.03617}, "331.4": {"P": 0.03805}, "388.3": {"P": 0.03948}, "455.1": {"P": 0.04056}, "533.3": {"P": 0.04133}, "625.0": {"P": 0.04185}, "732.4": {"P": 0.04213}, "858.3": {"P": 0.0422}, "1006.0": {"P": 0.04205}, "1179.0": {"P": 0.0417}, "1381.0": {"P": 0.04116}, "1619.0": {"P": 0.04042}, "1897.0": {"P": 0.0395}, "2223.0": {"P": 0.03841}, "2605.0": {"P": 0.03716}, "3052.0": {"P": 0.03577}, "3577.0": {"P": 0.03426}, "4192.0": {"P": 0.03265}, "4912.0": {"P": 0.03096}, "5757.0": {"P": 0.02922}, "6746.0": {"P": 0.02744}, "7905.0": {"P": 0.02566}, "9264.0": {"P": 0.02388}, "10860.0": {"P": 0.02214}, "12720.0": {"P": 0.02044}, "14910.0": {"P": 0.0188}, "17470.0": {"P": 0.01723}, "20470.0": {"P": 0.01574}, "23990.0": {"P": 0.01433}, "28120.0": {"P": 0.013}, "32950.0": {"P": 0.01177}, "38610.0": {"P": 0.01063}, "45250.0": {"P": 0.009569}, "53030.0": {"P": 0.008597}, "62140.0": {"P": 0.007706}, "72820.0": {"P": 0.006894}, "85330.0": {"P": 0.006156}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2832, "q": 0.1085, "mu": 1.686, "epsilonL": 0.0003685, "Eth": 42.16}, "E_min": 42.16, "E_max": 100000}}]}