pwiDB

Plasma-Surface Interaction Data Set 266

Sputtering of Ne⁺ on Fe(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Fe(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.71	0.0
	22.29	0.0001145
	26.56	0.0008837
	31.65	0.003433
	37.7	0.01
	44.92	0.02456
	53.52	0.05293
	63.77	0.1011
	75.98	0.1713
	90.53	0.258
	107.9	0.3502
	128.5	0.4385
	153.1	0.5186
	182.4	0.5909
	217.4	0.6574
	259.0	0.7205
	308.6	0.7819
	367.6	0.8426
	438.0	0.9034
	521.9	0.9645
	621.8	1.026
	740.9	1.088
	882.7	1.15
	1052.0	1.211
	1253.0	1.272
	1493.0	1.332
	1779.0	1.391
	2120.0	1.447
	2525.0	1.5
	3009.0	1.55
	3585.0	1.597
	4271.0	1.638
	5089.0	1.674
	6063.0	1.705
	7224.0	1.729
	8607.0	1.745
	10260.0	1.754
	12220.0	1.754
	14560.0	1.746
	17350.0	1.728
	20670.0	1.701
	24620.0	1.665
	29340.0	1.621
	34960.0	1.568
	41650.0	1.507
	49620.0	1.44
	59120.0	1.368
	70440.0	1.291
	83930.0	1.212

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2608
q = 4.488
mu = 2.386
epsilonL = 2.509e-05
Eth = 18.71

Fit range

E = 18.71 – 100000