{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2608, "q": 4.488, "mu": 2.386, "epsilonL": 2.509e-05, "Eth": 18.71}, "E_min": 18.71, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.71	0.0	
22.29	0.0001145	
26.56	0.0008837	
31.65	0.003433	
37.7	0.01	
44.92	0.02456	
53.52	0.05293	
63.77	0.1011	
75.98	0.1713	
90.53	0.258	
107.9	0.3502	
128.5	0.4385	
153.1	0.5186	
182.4	0.5909	
217.4	0.6574	
259.0	0.7205	
308.6	0.7819	
367.6	0.8426	
438.0	0.9034	
521.9	0.9645	
621.8	1.026	
740.9	1.088	
882.7	1.15	
1052.0	1.211	
1253.0	1.272	
1493.0	1.332	
1779.0	1.391	
2120.0	1.447	
2525.0	1.5	
3009.0	1.55	
3585.0	1.597	
4271.0	1.638	
5089.0	1.674	
6063.0	1.705	
7224.0	1.729	
8607.0	1.745	
10260.0	1.754	
12220.0	1.754	
14560.0	1.746	
17350.0	1.728	
20670.0	1.701	
24620.0	1.665	
29340.0	1.621	
34960.0	1.568	
41650.0	1.507	
49620.0	1.44	
59120.0	1.368	
70440.0	1.291	
83930.0	1.212	
-----