{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"18.71": {"P": 0}, "22.29": {"P": 0.0001145}, "26.56": {"P": 0.0008837}, "31.65": {"P": 0.003433}, "37.7": {"P": 0.01}, "44.92": {"P": 0.02456}, "53.52": {"P": 0.05293}, "63.77": {"P": 0.1011}, "75.98": {"P": 0.1713}, "90.53": {"P": 0.258}, "107.9": {"P": 0.3502}, "128.5": {"P": 0.4385}, "153.1": {"P": 0.5186}, "182.4": {"P": 0.5909}, "217.4": {"P": 0.6574}, "259.0": {"P": 0.7205}, "308.6": {"P": 0.7819}, "367.6": {"P": 0.8426}, "438.0": {"P": 0.9034}, "521.9": {"P": 0.9645}, "621.8": {"P": 1.026}, "740.9": {"P": 1.088}, "882.7": {"P": 1.15}, "1052.0": {"P": 1.211}, "1253.0": {"P": 1.272}, "1493.0": {"P": 1.332}, "1779.0": {"P": 1.391}, "2120.0": {"P": 1.447}, "2525.0": {"P": 1.5}, "3009.0": {"P": 1.55}, "3585.0": {"P": 1.597}, "4271.0": {"P": 1.638}, "5089.0": {"P": 1.674}, "6063.0": {"P": 1.705}, "7224.0": {"P": 1.729}, "8607.0": {"P": 1.745}, "10260.0": {"P": 1.754}, "12220.0": {"P": 1.754}, "14560.0": {"P": 1.746}, "17350.0": {"P": 1.728}, "20670.0": {"P": 1.701}, "24620.0": {"P": 1.665}, "29340.0": {"P": 1.621}, "34960.0": {"P": 1.568}, "41650.0": {"P": 1.507}, "49620.0": {"P": 1.44}, "59120.0": {"P": 1.368}, "70440.0": {"P": 1.291}, "83930.0": {"P": 1.212}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2608, "q": 4.488, "mu": 2.386, "epsilonL": 2.509e-05, "Eth": 18.71}, "E_min": 18.71, "E_max": 100000}}]}