pwiDB

Plasma-Surface Interaction Data Set 265

Sputtering of N⁺ on Fe(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Fe(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.61	0.0
	19.84	0.000117
	23.7	0.0008667
	28.3	0.003282
	33.8	0.009358
	40.37	0.02247
	48.22	0.04719
	57.59	0.08741
	68.78	0.143
	82.15	0.2079
	98.12	0.2739
	117.2	0.335
	140.0	0.3895
	167.2	0.4382
	199.7	0.4829
	238.5	0.5251
	284.8	0.566
	340.2	0.6061
	406.3	0.6458
	485.2	0.6854
	579.6	0.7246
	692.2	0.7635
	826.7	0.8017
	987.4	0.8391
	1179.0	0.8753
	1409.0	0.91
	1682.0	0.9428
	2009.0	0.9733
	2400.0	1.001
	2866.0	1.026
	3423.0	1.047
	4089.0	1.064
	4883.0	1.077
	5832.0	1.085
	6966.0	1.087
	8320.0	1.085
	9937.0	1.076
	11870.0	1.062
	14170.0	1.042
	16930.0	1.016
	20220.0	0.9846
	24150.0	0.9484
	28840.0	0.9077
	34450.0	0.8634
	41150.0	0.8161
	49140.0	0.7666
	58690.0	0.7159
	70100.0	0.6647
	83730.0	0.6138

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.259
q = 2.781
mu = 2.328
epsilonL = 4.053e-05
Eth = 16.61

Fit range

E = 16.61 – 100000