{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"16.61": {"P": 0}, "19.84": {"P": 0.000117}, "23.7": {"P": 0.0008667}, "28.3": {"P": 0.003282}, "33.8": {"P": 0.009358}, "40.37": {"P": 0.02247}, "48.22": {"P": 0.04719}, "57.59": {"P": 0.08741}, "68.78": {"P": 0.143}, "82.15": {"P": 0.2079}, "98.12": {"P": 0.2739}, "117.2": {"P": 0.335}, "140.0": {"P": 0.3895}, "167.2": {"P": 0.4382}, "199.7": {"P": 0.4829}, "238.5": {"P": 0.5251}, "284.8": {"P": 0.566}, "340.2": {"P": 0.6061}, "406.3": {"P": 0.6458}, "485.2": {"P": 0.6854}, "579.6": {"P": 0.7246}, "692.2": {"P": 0.7635}, "826.7": {"P": 0.8017}, "987.4": {"P": 0.8391}, "1179.0": {"P": 0.8753}, "1409.0": {"P": 0.91}, "1682.0": {"P": 0.9428}, "2009.0": {"P": 0.9733}, "2400.0": {"P": 1.001}, "2866.0": {"P": 1.026}, "3423.0": {"P": 1.047}, "4089.0": {"P": 1.064}, "4883.0": {"P": 1.077}, "5832.0": {"P": 1.085}, "6966.0": {"P": 1.087}, "8320.0": {"P": 1.085}, "9937.0": {"P": 1.076}, "11870.0": {"P": 1.062}, "14170.0": {"P": 1.042}, "16930.0": {"P": 1.016}, "20220.0": {"P": 0.9846}, "24150.0": {"P": 0.9484}, "28840.0": {"P": 0.9077}, "34450.0": {"P": 0.8634}, "41150.0": {"P": 0.8161}, "49140.0": {"P": 0.7666}, "58690.0": {"P": 0.7159}, "70100.0": {"P": 0.6647}, "83730.0": {"P": 0.6138}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.259, "q": 2.781, "mu": 2.328, "epsilonL": 4.053e-05, "Eth": 16.61}, "E_min": 16.61, "E_max": 100000}}]}