{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of N+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.259, "q": 2.781, "mu": 2.328, "epsilonL": 4.053e-05, "Eth": 16.61}, "E_min": 16.61, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
16.61	0.0	
19.84	0.000117	
23.7	0.0008667	
28.3	0.003282	
33.8	0.009358	
40.37	0.02247	
48.22	0.04719	
57.59	0.08741	
68.78	0.143	
82.15	0.2079	
98.12	0.2739	
117.2	0.335	
140.0	0.3895	
167.2	0.4382	
199.7	0.4829	
238.5	0.5251	
284.8	0.566	
340.2	0.6061	
406.3	0.6458	
485.2	0.6854	
579.6	0.7246	
692.2	0.7635	
826.7	0.8017	
987.4	0.8391	
1179.0	0.8753	
1409.0	0.91	
1682.0	0.9428	
2009.0	0.9733	
2400.0	1.001	
2866.0	1.026	
3423.0	1.047	
4089.0	1.064	
4883.0	1.077	
5832.0	1.085	
6966.0	1.087	
8320.0	1.085	
9937.0	1.076	
11870.0	1.062	
14170.0	1.042	
16930.0	1.016	
20220.0	0.9846	
24150.0	0.9484	
28840.0	0.9077	
34450.0	0.8634	
41150.0	0.8161	
49140.0	0.7666	
58690.0	0.7159	
70100.0	0.6647	
83730.0	0.6138	
-----