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Plasma-Surface Interaction Data Set 260

Sputtering of H+ on Fe(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Fe(pc) at 300 K

angle = 0.0 deg E /eV P
67.264.209e-33
78.072.387e-05
90.620.0001151
105.20.0003219
122.10.0007126
141.70.001367
164.50.002351
191.00.003672
221.60.005248
257.30.006911
298.60.008479
346.60.009821
402.40.01089
467.00.01168
542.10.01224
629.30.01262
730.40.01285
847.90.01296
984.20.01298
1142.00.01291
1326.00.01277
1539.00.01257
1787.00.01231
2074.00.012
2407.00.01164
2794.00.01124
3243.00.0108
3765.00.01034
4370.00.009848
5072.00.009341
5888.00.008824
6834.00.0083
7933.00.007777
9208.00.007259
10690.00.006751
12410.00.006257
14400.00.005779
16720.00.005322
19400.00.004886
22520.00.004473
26140.00.004084
30340.00.003719
35220.00.003379
40880.00.003064
47460.00.002772
55090.00.002503
63940.00.002256
74220.00.00203
86150.00.001823

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 67.26 – 100000