{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of H+ on Fe(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.8696, "q": 0.0339, "mu": 1.863, "epsilonL": 0.0003931, "Eth": 67.26}, "E_min": 67.26, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
67.26	4.209e-33	
78.07	2.387e-05	
90.62	0.0001151	
105.2	0.0003219	
122.1	0.0007126	
141.7	0.001367	
164.5	0.002351	
191.0	0.003672	
221.6	0.005248	
257.3	0.006911	
298.6	0.008479	
346.6	0.009821	
402.4	0.01089	
467.0	0.01168	
542.1	0.01224	
629.3	0.01262	
730.4	0.01285	
847.9	0.01296	
984.2	0.01298	
1142.0	0.01291	
1326.0	0.01277	
1539.0	0.01257	
1787.0	0.01231	
2074.0	0.012	
2407.0	0.01164	
2794.0	0.01124	
3243.0	0.0108	
3765.0	0.01034	
4370.0	0.009848	
5072.0	0.009341	
5888.0	0.008824	
6834.0	0.0083	
7933.0	0.007777	
9208.0	0.007259	
10690.0	0.006751	
12410.0	0.006257	
14400.0	0.005779	
16720.0	0.005322	
19400.0	0.004886	
22520.0	0.004473	
26140.0	0.004084	
30340.0	0.003719	
35220.0	0.003379	
40880.0	0.003064	
47460.0	0.002772	
55090.0	0.002503	
63940.0	0.002256	
74220.0	0.00203	
86150.0	0.001823	
-----