{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Fe", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"67.26": {"P": 4.209e-33}, "78.07": {"P": 2.387e-05}, "90.62": {"P": 0.0001151}, "105.2": {"P": 0.0003219}, "122.1": {"P": 0.0007126}, "141.7": {"P": 0.001367}, "164.5": {"P": 0.002351}, "191.0": {"P": 0.003672}, "221.6": {"P": 0.005248}, "257.3": {"P": 0.006911}, "298.6": {"P": 0.008479}, "346.6": {"P": 0.009821}, "402.4": {"P": 0.01089}, "467.0": {"P": 0.01168}, "542.1": {"P": 0.01224}, "629.3": {"P": 0.01262}, "730.4": {"P": 0.01285}, "847.9": {"P": 0.01296}, "984.2": {"P": 0.01298}, "1142.0": {"P": 0.01291}, "1326.0": {"P": 0.01277}, "1539.0": {"P": 0.01257}, "1787.0": {"P": 0.01231}, "2074.0": {"P": 0.012}, "2407.0": {"P": 0.01164}, "2794.0": {"P": 0.01124}, "3243.0": {"P": 0.0108}, "3765.0": {"P": 0.01034}, "4370.0": {"P": 0.009848}, "5072.0": {"P": 0.009341}, "5888.0": {"P": 0.008824}, "6834.0": {"P": 0.0083}, "7933.0": {"P": 0.007777}, "9208.0": {"P": 0.007259}, "10690.0": {"P": 0.006751}, "12410.0": {"P": 0.006257}, "14400.0": {"P": 0.005779}, "16720.0": {"P": 0.005322}, "19400.0": {"P": 0.004886}, "22520.0": {"P": 0.004473}, "26140.0": {"P": 0.004084}, "30340.0": {"P": 0.003719}, "35220.0": {"P": 0.003379}, "40880.0": {"P": 0.003064}, "47460.0": {"P": 0.002772}, "55090.0": {"P": 0.002503}, "63940.0": {"P": 0.002256}, "74220.0": {"P": 0.00203}, "86150.0": {"P": 0.001823}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.8696, "q": 0.0339, "mu": 1.863, "epsilonL": 0.0003931, "Eth": 67.26}, "E_min": 67.26, "E_max": 100000}}]}