pwiDB

Plasma-Surface Interaction Data Set 259

Sputtering of Xe⁺ on Mn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Mn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.92	0.0
	28.36	0.0004331
	33.62	0.002054
	39.86	0.005837
	47.25	0.01341
	56.01	0.02728
	66.41	0.05105
	78.72	0.0894
	93.33	0.1475
	110.6	0.23
	131.2	0.3392
	155.5	0.4739
	184.3	0.63
	218.5	0.8013
	259.1	0.9826
	307.1	1.17
	364.1	1.362
	431.6	1.559
	511.7	1.762
	606.6	1.973
	719.2	2.194
	852.6	2.425
	1011.0	2.669
	1198.0	2.927
	1421.0	3.2
	1684.0	3.488
	1996.0	3.792
	2367.0	4.112
	2806.0	4.448
	3326.0	4.8
	3943.0	5.167
	4675.0	5.548
	5542.0	5.942
	6570.0	6.348
	7789.0	6.765
	9234.0	7.19
	10950.0	7.622
	12980.0	8.057
	15380.0	8.494
	18240.0	8.93
	21620.0	9.361
	25630.0	9.785
	30390.0	10.2
	36020.0	10.59
	42710.0	10.97
	50630.0	11.33
	60020.0	11.66
	71150.0	11.96
	84350.0	12.22

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0978
q = 32.81
mu = 1.78
epsilonL = 1.488e-06
Eth = 23.92

Fit range

E = 23.92 – 100000