{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mn", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"23.92": {"P": 0}, "28.36": {"P": 0.0004331}, "33.62": {"P": 0.002054}, "39.86": {"P": 0.005837}, "47.25": {"P": 0.01341}, "56.01": {"P": 0.02728}, "66.41": {"P": 0.05105}, "78.72": {"P": 0.0894}, "93.33": {"P": 0.1475}, "110.6": {"P": 0.23}, "131.2": {"P": 0.3392}, "155.5": {"P": 0.4739}, "184.3": {"P": 0.63}, "218.5": {"P": 0.8013}, "259.1": {"P": 0.9826}, "307.1": {"P": 1.17}, "364.1": {"P": 1.362}, "431.6": {"P": 1.559}, "511.7": {"P": 1.762}, "606.6": {"P": 1.973}, "719.2": {"P": 2.194}, "852.6": {"P": 2.425}, "1011.0": {"P": 2.669}, "1198.0": {"P": 2.927}, "1421.0": {"P": 3.2}, "1684.0": {"P": 3.488}, "1996.0": {"P": 3.792}, "2367.0": {"P": 4.112}, "2806.0": {"P": 4.448}, "3326.0": {"P": 4.8}, "3943.0": {"P": 5.167}, "4675.0": {"P": 5.548}, "5542.0": {"P": 5.942}, "6570.0": {"P": 6.348}, "7789.0": {"P": 6.765}, "9234.0": {"P": 7.19}, "10950.0": {"P": 7.622}, "12980.0": {"P": 8.057}, "15380.0": {"P": 8.494}, "18240.0": {"P": 8.93}, "21620.0": {"P": 9.361}, "25630.0": {"P": 9.785}, "30390.0": {"P": 10.2}, "36020.0": {"P": 10.59}, "42710.0": {"P": 10.97}, "50630.0": {"P": 11.33}, "60020.0": {"P": 11.66}, "71150.0": {"P": 11.96}, "84350.0": {"P": 12.22}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0978, "q": 32.81, "mu": 1.78, "epsilonL": 1.488e-06, "Eth": 23.92}, "E_min": 23.92, "E_max": 100000}}]}