{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mn", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Mn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0978, "q": 32.81, "mu": 1.78, "epsilonL": 1.488e-06, "Eth": 23.92}, "E_min": 23.92, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.92	0.0	
28.36	0.0004331	
33.62	0.002054	
39.86	0.005837	
47.25	0.01341	
56.01	0.02728	
66.41	0.05105	
78.72	0.0894	
93.33	0.1475	
110.6	0.23	
131.2	0.3392	
155.5	0.4739	
184.3	0.63	
218.5	0.8013	
259.1	0.9826	
307.1	1.17	
364.1	1.362	
431.6	1.559	
511.7	1.762	
606.6	1.973	
719.2	2.194	
852.6	2.425	
1011.0	2.669	
1198.0	2.927	
1421.0	3.2	
1684.0	3.488	
1996.0	3.792	
2367.0	4.112	
2806.0	4.448	
3326.0	4.8	
3943.0	5.167	
4675.0	5.548	
5542.0	5.942	
6570.0	6.348	
7789.0	6.765	
9234.0	7.19	
10950.0	7.622	
12980.0	8.057	
15380.0	8.494	
18240.0	8.93	
21620.0	9.361	
25630.0	9.785	
30390.0	10.2	
36020.0	10.59	
42710.0	10.97	
50630.0	11.33	
60020.0	11.66	
71150.0	11.96	
84350.0	12.22	
-----