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Plasma-Surface Interaction Data Set 251

Sputtering of Xe+ on Cr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Cr(pc) at 300 K

angle = 0.0 deg E /eV P
35.781.265e-30
42.070.0005439
49.460.002539
58.160.00707
68.380.01585
80.40.03133
94.540.05664
111.20.09518
130.70.1499
153.70.222
180.70.3105
212.50.4125
249.80.5237
293.70.6406
345.40.7605
406.10.8824
477.51.006
561.41.133
660.11.263
776.21.398
912.61.539
1073.01.687
1262.01.841
1484.02.004
1744.02.175
2051.02.355
2412.02.543
2836.02.74
3334.02.946
3920.03.159
4609.03.381
5420.03.61
6372.03.846
7493.04.088
8810.04.334
10360.04.584
12180.04.837
14320.05.092
16840.05.346
19800.05.598
23280.05.847
27370.06.091
32190.06.328
37840.06.555
44500.06.772
52320.06.975
61520.07.163
72330.07.333
85050.07.483

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 35.78 – 100000