{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Xe+ on Cr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0642, "q": 20.06, "mu": 1.783, "epsilonL": 1.498e-06, "Eth": 35.78}, "E_min": 35.78, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
35.78	1.265e-30	
42.07	0.0005439	
49.46	0.002539	
58.16	0.00707	
68.38	0.01585	
80.4	0.03133	
94.54	0.05664	
111.2	0.09518	
130.7	0.1499	
153.7	0.222	
180.7	0.3105	
212.5	0.4125	
249.8	0.5237	
293.7	0.6406	
345.4	0.7605	
406.1	0.8824	
477.5	1.006	
561.4	1.133	
660.1	1.263	
776.2	1.398	
912.6	1.539	
1073.0	1.687	
1262.0	1.841	
1484.0	2.004	
1744.0	2.175	
2051.0	2.355	
2412.0	2.543	
2836.0	2.74	
3334.0	2.946	
3920.0	3.159	
4609.0	3.381	
5420.0	3.61	
6372.0	3.846	
7493.0	4.088	
8810.0	4.334	
10360.0	4.584	
12180.0	4.837	
14320.0	5.092	
16840.0	5.346	
19800.0	5.598	
23280.0	5.847	
27370.0	6.091	
32190.0	6.328	
37840.0	6.555	
44500.0	6.772	
52320.0	6.975	
61520.0	7.163	
72330.0	7.333	
85050.0	7.483	
-----