{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"35.78": {"P": 1.265e-30}, "42.07": {"P": 0.0005439}, "49.46": {"P": 0.002539}, "58.16": {"P": 0.00707}, "68.38": {"P": 0.01585}, "80.4": {"P": 0.03133}, "94.54": {"P": 0.05664}, "111.2": {"P": 0.09518}, "130.7": {"P": 0.1499}, "153.7": {"P": 0.222}, "180.7": {"P": 0.3105}, "212.5": {"P": 0.4125}, "249.8": {"P": 0.5237}, "293.7": {"P": 0.6406}, "345.4": {"P": 0.7605}, "406.1": {"P": 0.8824}, "477.5": {"P": 1.006}, "561.4": {"P": 1.133}, "660.1": {"P": 1.263}, "776.2": {"P": 1.398}, "912.6": {"P": 1.539}, "1073.0": {"P": 1.687}, "1262.0": {"P": 1.841}, "1484.0": {"P": 2.004}, "1744.0": {"P": 2.175}, "2051.0": {"P": 2.355}, "2412.0": {"P": 2.543}, "2836.0": {"P": 2.74}, "3334.0": {"P": 2.946}, "3920.0": {"P": 3.159}, "4609.0": {"P": 3.381}, "5420.0": {"P": 3.61}, "6372.0": {"P": 3.846}, "7493.0": {"P": 4.088}, "8810.0": {"P": 4.334}, "10360.0": {"P": 4.584}, "12180.0": {"P": 4.837}, "14320.0": {"P": 5.092}, "16840.0": {"P": 5.346}, "19800.0": {"P": 5.598}, "23280.0": {"P": 5.847}, "27370.0": {"P": 6.091}, "32190.0": {"P": 6.328}, "37840.0": {"P": 6.555}, "44500.0": {"P": 6.772}, "52320.0": {"P": 6.975}, "61520.0": {"P": 7.163}, "72330.0": {"P": 7.333}, "85050.0": {"P": 7.483}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0642, "q": 20.06, "mu": 1.783, "epsilonL": 1.498e-06, "Eth": 35.78}, "E_min": 35.78, "E_max": 100000}}]}