pwiDB

Plasma-Surface Interaction Data Set 250

Sputtering of Kr⁺ on Cr(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Cr(pc) at 300 K

angle = 0.0 deg	E /eV	P
	26.29	4.213e-41
	31.1	3.875e-05
	36.8	0.0002998
	43.54	0.001165
	51.52	0.003415
	60.96	0.008558
	72.13	0.0193
	85.35	0.04005
	101.0	0.07698
	119.5	0.1367
	141.4	0.223
	167.3	0.3333
	197.9	0.4587
	234.2	0.5885
	277.1	0.7155
	327.9	0.8372
	388.0	0.9546
	459.1	1.07
	543.2	1.185
	642.7	1.303
	760.4	1.424
	899.8	1.55
	1065.0	1.682
	1260.0	1.819
	1490.0	1.962
	1764.0	2.111
	2087.0	2.265
	2469.0	2.425
	2921.0	2.59
	3457.0	2.759
	4090.0	2.931
	4839.0	3.106
	5726.0	3.282
	6775.0	3.46
	8017.0	3.637
	9486.0	3.812
	11220.0	3.985
	13280.0	4.153
	15710.0	4.316
	18590.0	4.472
	22000.0	4.619
	26030.0	4.755
	30800.0	4.879
	36440.0	4.989
	43120.0	5.084
	51020.0	5.16
	60370.0	5.218
	71430.0	5.255
	84510.0	5.269

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.3681
q = 13.47
mu = 2.406
epsilonL = 3.289e-06
Eth = 26.29

Fit range

E = 26.29 – 100000