{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Cr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3681, "q": 13.47, "mu": 2.406, "epsilonL": 3.289e-06, "Eth": 26.29}, "E_min": 26.29, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
26.29	4.213e-41	
31.1	3.875e-05	
36.8	0.0002998	
43.54	0.001165	
51.52	0.003415	
60.96	0.008558	
72.13	0.0193	
85.35	0.04005	
101.0	0.07698	
119.5	0.1367	
141.4	0.223	
167.3	0.3333	
197.9	0.4587	
234.2	0.5885	
277.1	0.7155	
327.9	0.8372	
388.0	0.9546	
459.1	1.07	
543.2	1.185	
642.7	1.303	
760.4	1.424	
899.8	1.55	
1065.0	1.682	
1260.0	1.819	
1490.0	1.962	
1764.0	2.111	
2087.0	2.265	
2469.0	2.425	
2921.0	2.59	
3457.0	2.759	
4090.0	2.931	
4839.0	3.106	
5726.0	3.282	
6775.0	3.46	
8017.0	3.637	
9486.0	3.812	
11220.0	3.985	
13280.0	4.153	
15710.0	4.316	
18590.0	4.472	
22000.0	4.619	
26030.0	4.755	
30800.0	4.879	
36440.0	4.989	
43120.0	5.084	
51020.0	5.16	
60370.0	5.218	
71430.0	5.255	
84510.0	5.269	
-----