{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"26.29": {"P": 4.213e-41}, "31.1": {"P": 3.875e-05}, "36.8": {"P": 0.0002998}, "43.54": {"P": 0.001165}, "51.52": {"P": 0.003415}, "60.96": {"P": 0.008558}, "72.13": {"P": 0.0193}, "85.35": {"P": 0.04005}, "101.0": {"P": 0.07698}, "119.5": {"P": 0.1367}, "141.4": {"P": 0.223}, "167.3": {"P": 0.3333}, "197.9": {"P": 0.4587}, "234.2": {"P": 0.5885}, "277.1": {"P": 0.7155}, "327.9": {"P": 0.8372}, "388.0": {"P": 0.9546}, "459.1": {"P": 1.07}, "543.2": {"P": 1.185}, "642.7": {"P": 1.303}, "760.4": {"P": 1.424}, "899.8": {"P": 1.55}, "1065.0": {"P": 1.682}, "1260.0": {"P": 1.819}, "1490.0": {"P": 1.962}, "1764.0": {"P": 2.111}, "2087.0": {"P": 2.265}, "2469.0": {"P": 2.425}, "2921.0": {"P": 2.59}, "3457.0": {"P": 2.759}, "4090.0": {"P": 2.931}, "4839.0": {"P": 3.106}, "5726.0": {"P": 3.282}, "6775.0": {"P": 3.46}, "8017.0": {"P": 3.637}, "9486.0": {"P": 3.812}, "11220.0": {"P": 3.985}, "13280.0": {"P": 4.153}, "15710.0": {"P": 4.316}, "18590.0": {"P": 4.472}, "22000.0": {"P": 4.619}, "26030.0": {"P": 4.755}, "30800.0": {"P": 4.879}, "36440.0": {"P": 4.989}, "43120.0": {"P": 5.084}, "51020.0": {"P": 5.16}, "60370.0": {"P": 5.218}, "71430.0": {"P": 5.255}, "84510.0": {"P": 5.269}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3681, "q": 13.47, "mu": 2.406, "epsilonL": 3.289e-06, "Eth": 26.29}, "E_min": 26.29, "E_max": 100000}}]}