Return to search

Plasma-Surface Interaction Data Set 246

Sputtering of 4He+ on Cr(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Cr(pc) at 300 K

angle = 0.0 deg E /eV P
21.610.0
25.670.0001583
30.50.0007951
36.230.002319
43.040.005342
51.130.0106
60.740.0187
72.160.02969
85.720.04274
101.80.05644
121.00.06942
143.70.08089
170.70.09063
202.80.09882
240.90.1057
286.20.1117
340.00.1168
403.90.1213
479.90.1252
570.10.1285
677.20.1314
804.50.1337
955.70.1354
1135.00.1366
1349.00.1371
1602.00.137
1903.00.1362
2261.00.1347
2686.00.1325
3191.00.1296
3791.00.126
4504.00.1219
5350.00.1171
6356.00.1119
7550.00.1063
8969.00.1004
10660.00.0943
12660.00.08806
15040.00.0818
17860.00.07559
21220.00.06952
25210.00.06363
29950.00.05799
35580.00.05264
42270.00.04759
50210.00.04287
59650.00.03849
70860.00.03445
84180.00.03074

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 21.61 – 100000