{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"21.61": {"P": 0}, "25.67": {"P": 0.0001583}, "30.5": {"P": 0.0007951}, "36.23": {"P": 0.002319}, "43.04": {"P": 0.005342}, "51.13": {"P": 0.0106}, "60.74": {"P": 0.0187}, "72.16": {"P": 0.02969}, "85.72": {"P": 0.04274}, "101.8": {"P": 0.05644}, "121.0": {"P": 0.06942}, "143.7": {"P": 0.08089}, "170.7": {"P": 0.09063}, "202.8": {"P": 0.09882}, "240.9": {"P": 0.1057}, "286.2": {"P": 0.1117}, "340.0": {"P": 0.1168}, "403.9": {"P": 0.1213}, "479.9": {"P": 0.1252}, "570.1": {"P": 0.1285}, "677.2": {"P": 0.1314}, "804.5": {"P": 0.1337}, "955.7": {"P": 0.1354}, "1135.0": {"P": 0.1366}, "1349.0": {"P": 0.1371}, "1602.0": {"P": 0.137}, "1903.0": {"P": 0.1362}, "2261.0": {"P": 0.1347}, "2686.0": {"P": 0.1325}, "3191.0": {"P": 0.1296}, "3791.0": {"P": 0.126}, "4504.0": {"P": 0.1219}, "5350.0": {"P": 0.1171}, "6356.0": {"P": 0.1119}, "7550.0": {"P": 0.1063}, "8969.0": {"P": 0.1004}, "10660.0": {"P": 0.0943}, "12660.0": {"P": 0.08806}, "15040.0": {"P": 0.0818}, "17860.0": {"P": 0.07559}, "21220.0": {"P": 0.06952}, "25210.0": {"P": 0.06363}, "29950.0": {"P": 0.05799}, "35580.0": {"P": 0.05264}, "42270.0": {"P": 0.04759}, "50210.0": {"P": 0.04287}, "59650.0": {"P": 0.03849}, "70860.0": {"P": 0.03445}, "84180.0": {"P": 0.03074}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.312, "q": 0.3508, "mu": 1.856, "epsilonL": 0.0002, "Eth": 21.61}, "E_min": 21.61, "E_max": 100000}}]}