{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cr", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on Cr(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.312, "q": 0.3508, "mu": 1.856, "epsilonL": 0.0002, "Eth": 21.61}, "E_min": 21.61, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.61	0.0	
25.67	0.0001583	
30.5	0.0007951	
36.23	0.002319	
43.04	0.005342	
51.13	0.0106	
60.74	0.0187	
72.16	0.02969	
85.72	0.04274	
101.8	0.05644	
121.0	0.06942	
143.7	0.08089	
170.7	0.09063	
202.8	0.09882	
240.9	0.1057	
286.2	0.1117	
340.0	0.1168	
403.9	0.1213	
479.9	0.1252	
570.1	0.1285	
677.2	0.1314	
804.5	0.1337	
955.7	0.1354	
1135.0	0.1366	
1349.0	0.1371	
1602.0	0.137	
1903.0	0.1362	
2261.0	0.1347	
2686.0	0.1325	
3191.0	0.1296	
3791.0	0.126	
4504.0	0.1219	
5350.0	0.1171	
6356.0	0.1119	
7550.0	0.1063	
8969.0	0.1004	
10660.0	0.0943	
12660.0	0.08806	
15040.0	0.0818	
17860.0	0.07559	
21220.0	0.06952	
25210.0	0.06363	
29950.0	0.05799	
35580.0	0.05264	
42270.0	0.04759	
50210.0	0.04287	
59650.0	0.03849	
70860.0	0.03445	
84180.0	0.03074	
-----