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Plasma-Surface Interaction Data Set 233

Sputtering of T+ on V(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on V(pc) at 300 K

angle = 0.0 deg E /eV P
33.340.0
39.260.0003043
46.230.00102
54.440.002219
64.10.003952
75.470.006172
88.870.008724
104.60.01138
123.20.01392
145.10.0162
170.80.01815
201.20.01976
236.90.02106
278.90.0221
328.40.02291
386.70.02353
455.40.02398
536.20.02427
631.30.02443
743.40.02445
875.40.02434
1031.00.0241
1214.00.02374
1429.00.02327
1683.00.02268
1981.00.02199
2333.00.02121
2747.00.02034
3235.00.0194
3809.00.01841
4485.00.01738
5281.00.01633
6219.00.01526
7322.00.0142
8622.00.01315
10150.00.01212
11950.00.01113
14080.00.01018
16570.00.009282
19520.00.008431
22980.00.007633
27060.00.00689
31860.00.006202
37520.00.005568
44180.00.004986
52020.00.004455
61250.00.003972
72120.00.003534
84930.00.003138

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 33.34 – 100000