{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"33.34": {"P": 0}, "39.26": {"P": 0.0003043}, "46.23": {"P": 0.00102}, "54.44": {"P": 0.002219}, "64.1": {"P": 0.003952}, "75.47": {"P": 0.006172}, "88.87": {"P": 0.008724}, "104.6": {"P": 0.01138}, "123.2": {"P": 0.01392}, "145.1": {"P": 0.0162}, "170.8": {"P": 0.01815}, "201.2": {"P": 0.01976}, "236.9": {"P": 0.02106}, "278.9": {"P": 0.0221}, "328.4": {"P": 0.02291}, "386.7": {"P": 0.02353}, "455.4": {"P": 0.02398}, "536.2": {"P": 0.02427}, "631.3": {"P": 0.02443}, "743.4": {"P": 0.02445}, "875.4": {"P": 0.02434}, "1031.0": {"P": 0.0241}, "1214.0": {"P": 0.02374}, "1429.0": {"P": 0.02327}, "1683.0": {"P": 0.02268}, "1981.0": {"P": 0.02199}, "2333.0": {"P": 0.02121}, "2747.0": {"P": 0.02034}, "3235.0": {"P": 0.0194}, "3809.0": {"P": 0.01841}, "4485.0": {"P": 0.01738}, "5281.0": {"P": 0.01633}, "6219.0": {"P": 0.01526}, "7322.0": {"P": 0.0142}, "8622.0": {"P": 0.01315}, "10150.0": {"P": 0.01212}, "11950.0": {"P": 0.01113}, "14080.0": {"P": 0.01018}, "16570.0": {"P": 0.009282}, "19520.0": {"P": 0.008431}, "22980.0": {"P": 0.007633}, "27060.0": {"P": 0.00689}, "31860.0": {"P": 0.006202}, "37520.0": {"P": 0.005568}, "44180.0": {"P": 0.004986}, "52020.0": {"P": 0.004455}, "61250.0": {"P": 0.003972}, "72120.0": {"P": 0.003534}, "84930.0": {"P": 0.003138}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1885, "q": 0.063, "mu": 1.406, "epsilonL": 0.000443, "Eth": 33.34}, "E_min": 33.34, "E_max": 100000}}]}