{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "V", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of T+ on V(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1885, "q": 0.063, "mu": 1.406, "epsilonL": 0.000443, "Eth": 33.34}, "E_min": 33.34, "E_max": 100000} angle = 0.0 deg E /eV P 33.34 0.0 39.26 0.0003043 46.23 0.00102 54.44 0.002219 64.1 0.003952 75.47 0.006172 88.87 0.008724 104.6 0.01138 123.2 0.01392 145.1 0.0162 170.8 0.01815 201.2 0.01976 236.9 0.02106 278.9 0.0221 328.4 0.02291 386.7 0.02353 455.4 0.02398 536.2 0.02427 631.3 0.02443 743.4 0.02445 875.4 0.02434 1031.0 0.0241 1214.0 0.02374 1429.0 0.02327 1683.0 0.02268 1981.0 0.02199 2333.0 0.02121 2747.0 0.02034 3235.0 0.0194 3809.0 0.01841 4485.0 0.01738 5281.0 0.01633 6219.0 0.01526 7322.0 0.0142 8622.0 0.01315 10150.0 0.01212 11950.0 0.01113 14080.0 0.01018 16570.0 0.009282 19520.0 0.008431 22980.0 0.007633 27060.0 0.00689 31860.0 0.006202 37520.0 0.005568 44180.0 0.004986 52020.0 0.004455 61250.0 0.003972 72120.0 0.003534 84930.0 0.003138 -----