pwiDB

Plasma-Surface Interaction Data Set 215

Sputtering of Ar⁺ on Si(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Si(pc) at 300 K

angle = 0.0 deg	E /eV	P
	32.84	0.0
	38.68	0.0002956
	45.56	0.001139
	53.66	0.002824
	63.21	0.005842
	74.45	0.01091
	87.69	0.019
	103.3	0.0314
	121.7	0.04957
	143.3	0.07497
	168.8	0.1087
	198.8	0.1511
	234.2	0.2013
	275.8	0.2575
	324.9	0.3173
	382.6	0.3784
	450.7	0.4388
	530.9	0.4973
	625.3	0.5535
	736.5	0.6072
	867.5	0.6587
	1022.0	0.7083
	1204.0	0.7563
	1418.0	0.8028
	1670.0	0.848
	1967.0	0.892
	2316.0	0.9346
	2729.0	0.9759
	3214.0	1.016
	3785.0	1.053
	4459.0	1.089
	5252.0	1.123
	6186.0	1.154
	7286.0	1.181
	8582.0	1.206
	10110.0	1.226
	11910.0	1.243
	14020.0	1.254
	16520.0	1.261
	19460.0	1.263
	22920.0	1.259
	26990.0	1.25
	31790.0	1.235
	37450.0	1.214
	44110.0	1.187
	51950.0	1.155
	61200.0	1.118
	72080.0	1.076
	84900.0	1.031

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.277
q = 3.23
mu = 1.528
epsilonL = 1.497e-05
Eth = 32.84

Fit range

E = 32.84 – 100000