{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Si", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"32.84": {"P": 0}, "38.68": {"P": 0.0002956}, "45.56": {"P": 0.001139}, "53.66": {"P": 0.002824}, "63.21": {"P": 0.005842}, "74.45": {"P": 0.01091}, "87.69": {"P": 0.019}, "103.3": {"P": 0.0314}, "121.7": {"P": 0.04957}, "143.3": {"P": 0.07497}, "168.8": {"P": 0.1087}, "198.8": {"P": 0.1511}, "234.2": {"P": 0.2013}, "275.8": {"P": 0.2575}, "324.9": {"P": 0.3173}, "382.6": {"P": 0.3784}, "450.7": {"P": 0.4388}, "530.9": {"P": 0.4973}, "625.3": {"P": 0.5535}, "736.5": {"P": 0.6072}, "867.5": {"P": 0.6587}, "1022.0": {"P": 0.7083}, "1204.0": {"P": 0.7563}, "1418.0": {"P": 0.8028}, "1670.0": {"P": 0.848}, "1967.0": {"P": 0.892}, "2316.0": {"P": 0.9346}, "2729.0": {"P": 0.9759}, "3214.0": {"P": 1.016}, "3785.0": {"P": 1.053}, "4459.0": {"P": 1.089}, "5252.0": {"P": 1.123}, "6186.0": {"P": 1.154}, "7286.0": {"P": 1.181}, "8582.0": {"P": 1.206}, "10110.0": {"P": 1.226}, "11910.0": {"P": 1.243}, "14020.0": {"P": 1.254}, "16520.0": {"P": 1.261}, "19460.0": {"P": 1.263}, "22920.0": {"P": 1.259}, "26990.0": {"P": 1.25}, "31790.0": {"P": 1.235}, "37450.0": {"P": 1.214}, "44110.0": {"P": 1.187}, "51950.0": {"P": 1.155}, "61200.0": {"P": 1.118}, "72080.0": {"P": 1.076}, "84900.0": {"P": 1.031}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.277, "q": 3.23, "mu": 1.528, "epsilonL": 1.497e-05, "Eth": 32.84}, "E_min": 32.84, "E_max": 100000}}]}