pwiDB

Plasma-Surface Interaction Data Set 213

Sputtering of Ne⁺ on Si(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Si(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.41	0.0
	27.77	0.0003844
	32.93	0.001481
	39.06	0.003685
	46.32	0.00764
	54.94	0.01427
	65.16	0.02477
	77.28	0.04055
	91.66	0.063
	108.7	0.09303
	128.9	0.1306
	152.9	0.1746
	181.4	0.2229
	215.1	0.2728
	255.1	0.3221
	302.6	0.3692
	358.9	0.4135
	425.6	0.4546
	504.8	0.4929
	598.7	0.5286
	710.1	0.5621
	842.2	0.5936
	998.8	0.6232
	1185.0	0.6512
	1405.0	0.6774
	1666.0	0.7018
	1976.0	0.7242
	2344.0	0.7446
	2780.0	0.7626
	3297.0	0.778
	3910.0	0.7906
	4638.0	0.8002
	5501.0	0.8064
	6524.0	0.8091
	7738.0	0.808
	9177.0	0.803
	10880.0	0.794
	12910.0	0.7809
	15310.0	0.7639
	18160.0	0.7431
	21540.0	0.7188
	25540.0	0.6912
	30290.0	0.6608
	35930.0	0.6281
	42610.0	0.5936
	50540.0	0.5579
	59940.0	0.5215
	71090.0	0.4849
	84320.0	0.4486

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2995
q = 2.069
mu = 1.515
epsilonL = 4.184e-05
Eth = 23.41

Fit range

E = 23.41 – 100000