{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Si", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"23.41": {"P": 0}, "27.77": {"P": 0.0003844}, "32.93": {"P": 0.001481}, "39.06": {"P": 0.003685}, "46.32": {"P": 0.00764}, "54.94": {"P": 0.01427}, "65.16": {"P": 0.02477}, "77.28": {"P": 0.04055}, "91.66": {"P": 0.063}, "108.7": {"P": 0.09303}, "128.9": {"P": 0.1306}, "152.9": {"P": 0.1746}, "181.4": {"P": 0.2229}, "215.1": {"P": 0.2728}, "255.1": {"P": 0.3221}, "302.6": {"P": 0.3692}, "358.9": {"P": 0.4135}, "425.6": {"P": 0.4546}, "504.8": {"P": 0.4929}, "598.7": {"P": 0.5286}, "710.1": {"P": 0.5621}, "842.2": {"P": 0.5936}, "998.8": {"P": 0.6232}, "1185.0": {"P": 0.6512}, "1405.0": {"P": 0.6774}, "1666.0": {"P": 0.7018}, "1976.0": {"P": 0.7242}, "2344.0": {"P": 0.7446}, "2780.0": {"P": 0.7626}, "3297.0": {"P": 0.778}, "3910.0": {"P": 0.7906}, "4638.0": {"P": 0.8002}, "5501.0": {"P": 0.8064}, "6524.0": {"P": 0.8091}, "7738.0": {"P": 0.808}, "9177.0": {"P": 0.803}, "10880.0": {"P": 0.794}, "12910.0": {"P": 0.7809}, "15310.0": {"P": 0.7639}, "18160.0": {"P": 0.7431}, "21540.0": {"P": 0.7188}, "25540.0": {"P": 0.6912}, "30290.0": {"P": 0.6608}, "35930.0": {"P": 0.6281}, "42610.0": {"P": 0.5936}, "50540.0": {"P": 0.5579}, "59940.0": {"P": 0.5215}, "71090.0": {"P": 0.4849}, "84320.0": {"P": 0.4486}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2995, "q": 2.069, "mu": 1.515, "epsilonL": 4.184e-05, "Eth": 23.41}, "E_min": 23.41, "E_max": 100000}}]}