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Plasma-Surface Interaction Data Set 212

Sputtering of N⁺ on Si(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Si(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.7	0.0
	19.94	0.0001361
	23.81	0.0006644
	28.44	0.001934
	33.96	0.004542
	40.56	0.009427
	48.44	0.01794
	57.85	0.03175
	69.08	0.05248
	82.5	0.08094
	98.52	0.1164
	117.7	0.1565
	140.5	0.1978
	167.8	0.2377
	200.4	0.2745
	239.3	0.3077
	285.8	0.3376
	341.3	0.3646
	407.6	0.3894
	486.8	0.4124
	581.3	0.4338
	694.3	0.4539
	829.1	0.4726
	990.1	0.4899
	1182.0	0.5058
	1412.0	0.52
	1686.0	0.5325
	2014.0	0.5431
	2405.0	0.5515
	2872.0	0.5575
	3430.0	0.561
	4096.0	0.5618
	4892.0	0.5596
	5842.0	0.5545
	6977.0	0.5464
	8332.0	0.5353
	9951.0	0.5212
	11880.0	0.5044
	14190.0	0.4851
	16950.0	0.4636
	20240.0	0.4403
	24170.0	0.4156
	28870.0	0.3899
	34470.0	0.3636
	41170.0	0.3372
	49160.0	0.3109
	58710.0	0.2853
	70120.0	0.2604
	83740.0	0.2367

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.4888
q = 1.437
mu = 1.797
epsilonL = 7.199e-05
Eth = 16.7

Fit range

E = 16.7 – 100000