{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Si", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"16.7": {"P": 0}, "19.94": {"P": 0.0001361}, "23.81": {"P": 0.0006644}, "28.44": {"P": 0.001934}, "33.96": {"P": 0.004542}, "40.56": {"P": 0.009427}, "48.44": {"P": 0.01794}, "57.85": {"P": 0.03175}, "69.08": {"P": 0.05248}, "82.5": {"P": 0.08094}, "98.52": {"P": 0.1164}, "117.7": {"P": 0.1565}, "140.5": {"P": 0.1978}, "167.8": {"P": 0.2377}, "200.4": {"P": 0.2745}, "239.3": {"P": 0.3077}, "285.8": {"P": 0.3376}, "341.3": {"P": 0.3646}, "407.6": {"P": 0.3894}, "486.8": {"P": 0.4124}, "581.3": {"P": 0.4338}, "694.3": {"P": 0.4539}, "829.1": {"P": 0.4726}, "990.1": {"P": 0.4899}, "1182.0": {"P": 0.5058}, "1412.0": {"P": 0.52}, "1686.0": {"P": 0.5325}, "2014.0": {"P": 0.5431}, "2405.0": {"P": 0.5515}, "2872.0": {"P": 0.5575}, "3430.0": {"P": 0.561}, "4096.0": {"P": 0.5618}, "4892.0": {"P": 0.5596}, "5842.0": {"P": 0.5545}, "6977.0": {"P": 0.5464}, "8332.0": {"P": 0.5353}, "9951.0": {"P": 0.5212}, "11880.0": {"P": 0.5044}, "14190.0": {"P": 0.4851}, "16950.0": {"P": 0.4636}, "20240.0": {"P": 0.4403}, "24170.0": {"P": 0.4156}, "28870.0": {"P": 0.3899}, "34470.0": {"P": 0.3636}, "41170.0": {"P": 0.3372}, "49160.0": {"P": 0.3109}, "58710.0": {"P": 0.2853}, "70120.0": {"P": 0.2604}, "83740.0": {"P": 0.2367}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4888, "q": 1.437, "mu": 1.797, "epsilonL": 7.199e-05, "Eth": 16.7}, "E_min": 16.7, "E_max": 100000}}]}