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Plasma-Surface Interaction Data Set 200

Sputtering of ⁴He⁺ on Al(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ⁴He⁺ on Al(pc) at 300 K

angle = 0.0 deg	E /eV	P
	14.1	0.0
	16.9	0.0009188
	20.25	0.003029
	24.26	0.006715
	29.08	0.01246
	34.84	0.02064
	41.76	0.03129
	50.04	0.04399
	59.97	0.05789
	71.86	0.07199
	86.11	0.0854
	103.2	0.09756
	123.7	0.1082
	148.2	0.1174
	177.6	0.1253
	212.8	0.1319
	255.0	0.1374
	305.6	0.1419
	366.3	0.1456
	438.9	0.1484
	526.0	0.1503
	630.3	0.1514
	755.3	0.1516
	905.1	0.1509
	1085.0	0.1494
	1300.0	0.1469
	1558.0	0.1436
	1867.0	0.1395
	2237.0	0.1346
	2681.0	0.1291
	3212.0	0.123
	3850.0	0.1163
	4613.0	0.1094
	5528.0	0.1022
	6625.0	0.09493
	7939.0	0.08765
	9514.0	0.08048
	11400.0	0.07351
	13660.0	0.06681
	16370.0	0.06044
	19620.0	0.05444
	23510.0	0.04883
	28180.0	0.04364
	33770.0	0.03886
	40460.0	0.0345
	48490.0	0.03053
	58110.0	0.02694
	69630.0	0.02371
	83450.0	0.02081

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2072
q = 0.3889
mu = 1.323
epsilonL = 0.0004085
Eth = 14.1

Fit range

E = 14.1 – 100000