{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Al(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2072, "q": 0.3889, "mu": 1.323, "epsilonL": 0.0004085, "Eth": 14.1}, "E_min": 14.1, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
14.1	0.0	
16.9	0.0009188	
20.25	0.003029	
24.26	0.006715	
29.08	0.01246	
34.84	0.02064	
41.76	0.03129	
50.04	0.04399	
59.97	0.05789	
71.86	0.07199	
86.11	0.0854	
103.2	0.09756	
123.7	0.1082	
148.2	0.1174	
177.6	0.1253	
212.8	0.1319	
255.0	0.1374	
305.6	0.1419	
366.3	0.1456	
438.9	0.1484	
526.0	0.1503	
630.3	0.1514	
755.3	0.1516	
905.1	0.1509	
1085.0	0.1494	
1300.0	0.1469	
1558.0	0.1436	
1867.0	0.1395	
2237.0	0.1346	
2681.0	0.1291	
3212.0	0.123	
3850.0	0.1163	
4613.0	0.1094	
5528.0	0.1022	
6625.0	0.09493	
7939.0	0.08765	
9514.0	0.08048	
11400.0	0.07351	
13660.0	0.06681	
16370.0	0.06044	
19620.0	0.05444	
23510.0	0.04883	
28180.0	0.04364	
33770.0	0.03886	
40460.0	0.0345	
48490.0	0.03053	
58110.0	0.02694	
69630.0	0.02371	
83450.0	0.02081	
-----