{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Al", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"14.1": {"P": 0}, "16.9": {"P": 0.0009188}, "20.25": {"P": 0.003029}, "24.26": {"P": 0.006715}, "29.08": {"P": 0.01246}, "34.84": {"P": 0.02064}, "41.76": {"P": 0.03129}, "50.04": {"P": 0.04399}, "59.97": {"P": 0.05789}, "71.86": {"P": 0.07199}, "86.11": {"P": 0.0854}, "103.2": {"P": 0.09756}, "123.7": {"P": 0.1082}, "148.2": {"P": 0.1174}, "177.6": {"P": 0.1253}, "212.8": {"P": 0.1319}, "255.0": {"P": 0.1374}, "305.6": {"P": 0.1419}, "366.3": {"P": 0.1456}, "438.9": {"P": 0.1484}, "526.0": {"P": 0.1503}, "630.3": {"P": 0.1514}, "755.3": {"P": 0.1516}, "905.1": {"P": 0.1509}, "1085.0": {"P": 0.1494}, "1300.0": {"P": 0.1469}, "1558.0": {"P": 0.1436}, "1867.0": {"P": 0.1395}, "2237.0": {"P": 0.1346}, "2681.0": {"P": 0.1291}, "3212.0": {"P": 0.123}, "3850.0": {"P": 0.1163}, "4613.0": {"P": 0.1094}, "5528.0": {"P": 0.1022}, "6625.0": {"P": 0.09493}, "7939.0": {"P": 0.08765}, "9514.0": {"P": 0.08048}, "11400.0": {"P": 0.07351}, "13660.0": {"P": 0.06681}, "16370.0": {"P": 0.06044}, "19620.0": {"P": 0.05444}, "23510.0": {"P": 0.04883}, "28180.0": {"P": 0.04364}, "33770.0": {"P": 0.03886}, "40460.0": {"P": 0.0345}, "48490.0": {"P": 0.03053}, "58110.0": {"P": 0.02694}, "69630.0": {"P": 0.02371}, "83450.0": {"P": 0.02081}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2072, "q": 0.3889, "mu": 1.323, "epsilonL": 0.0004085, "Eth": 14.1}, "E_min": 14.1, "E_max": 100000}}]}