pwiDB

Plasma-Surface Interaction Data Set 194

Sputtering of Ar⁺ on Mg(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Mg(pc) at 300 K

angle = 0.0 deg	E /eV	P
	10.78	0.0
	12.98	0.0002155
	15.64	0.001099
	18.85	0.003312
	22.71	0.008034
	27.37	0.0172
	32.98	0.03377
	39.74	0.06167
	47.88	0.1053
	57.7	0.1678
	69.52	0.2496
	83.77	0.3471
	100.9	0.454
	121.6	0.5642
	146.6	0.6735
	176.6	0.78
	212.8	0.8841
	256.4	0.9864
	309.0	1.088
	372.3	1.191
	448.6	1.294
	540.5	1.4
	651.3	1.507
	784.8	1.615
	945.6	1.725
	1139.0	1.836
	1373.0	1.947
	1654.0	2.058
	1993.0	2.167
	2402.0	2.274
	2894.0	2.377
	3488.0	2.476
	4202.0	2.57
	5064.0	2.656
	6101.0	2.735
	7352.0	2.804
	8859.0	2.861
	10670.0	2.907
	12860.0	2.939
	15500.0	2.956
	18680.0	2.958
	22500.0	2.942
	27110.0	2.909
	32670.0	2.858
	39370.0	2.791
	47440.0	2.706
	57160.0	2.606
	68870.0	2.493
	82990.0	2.368

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2522
q = 7.566
mu = 1.829
epsilonL = 1.638e-05
Eth = 10.78

Fit range

E = 10.78 – 100000