{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mg", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Mg(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2522, "q": 7.566, "mu": 1.829, "epsilonL": 1.638e-05, "Eth": 10.78}, "E_min": 10.78, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
10.78	0.0	
12.98	0.0002155	
15.64	0.001099	
18.85	0.003312	
22.71	0.008034	
27.37	0.0172	
32.98	0.03377	
39.74	0.06167	
47.88	0.1053	
57.7	0.1678	
69.52	0.2496	
83.77	0.3471	
100.9	0.454	
121.6	0.5642	
146.6	0.6735	
176.6	0.78	
212.8	0.8841	
256.4	0.9864	
309.0	1.088	
372.3	1.191	
448.6	1.294	
540.5	1.4	
651.3	1.507	
784.8	1.615	
945.6	1.725	
1139.0	1.836	
1373.0	1.947	
1654.0	2.058	
1993.0	2.167	
2402.0	2.274	
2894.0	2.377	
3488.0	2.476	
4202.0	2.57	
5064.0	2.656	
6101.0	2.735	
7352.0	2.804	
8859.0	2.861	
10670.0	2.907	
12860.0	2.939	
15500.0	2.956	
18680.0	2.958	
22500.0	2.942	
27110.0	2.909	
32670.0	2.858	
39370.0	2.791	
47440.0	2.706	
57160.0	2.606	
68870.0	2.493	
82990.0	2.368	
-----