{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mg", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"10.78": {"P": 0}, "12.98": {"P": 0.0002155}, "15.64": {"P": 0.001099}, "18.85": {"P": 0.003312}, "22.71": {"P": 0.008034}, "27.37": {"P": 0.0172}, "32.98": {"P": 0.03377}, "39.74": {"P": 0.06167}, "47.88": {"P": 0.1053}, "57.7": {"P": 0.1678}, "69.52": {"P": 0.2496}, "83.77": {"P": 0.3471}, "100.9": {"P": 0.454}, "121.6": {"P": 0.5642}, "146.6": {"P": 0.6735}, "176.6": {"P": 0.78}, "212.8": {"P": 0.8841}, "256.4": {"P": 0.9864}, "309.0": {"P": 1.088}, "372.3": {"P": 1.191}, "448.6": {"P": 1.294}, "540.5": {"P": 1.4}, "651.3": {"P": 1.507}, "784.8": {"P": 1.615}, "945.6": {"P": 1.725}, "1139.0": {"P": 1.836}, "1373.0": {"P": 1.947}, "1654.0": {"P": 2.058}, "1993.0": {"P": 2.167}, "2402.0": {"P": 2.274}, "2894.0": {"P": 2.377}, "3488.0": {"P": 2.476}, "4202.0": {"P": 2.57}, "5064.0": {"P": 2.656}, "6101.0": {"P": 2.735}, "7352.0": {"P": 2.804}, "8859.0": {"P": 2.861}, "10670.0": {"P": 2.907}, "12860.0": {"P": 2.939}, "15500.0": {"P": 2.956}, "18680.0": {"P": 2.958}, "22500.0": {"P": 2.942}, "27110.0": {"P": 2.909}, "32670.0": {"P": 2.858}, "39370.0": {"P": 2.791}, "47440.0": {"P": 2.706}, "57160.0": {"P": 2.606}, "68870.0": {"P": 2.493}, "82990.0": {"P": 2.368}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2522, "q": 7.566, "mu": 1.829, "epsilonL": 1.638e-05, "Eth": 10.78}, "E_min": 10.78, "E_max": 100000}}]}