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Plasma-Surface Interaction Data Set 189

Sputtering of Ne⁺ on C(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on C(pc) at 300 K

angle = 0.0 deg	E /eV	P
	46.69	0.0
	54.6	6.056e-05
	63.85	0.0002548
	74.67	0.0006673
	87.32	0.001441
	102.1	0.002798
	119.4	0.005075
	139.7	0.00877
	163.3	0.01458
	191.0	0.02343
	223.3	0.03646
	261.2	0.05485
	305.4	0.07955
	357.2	0.1109
	417.7	0.148
	488.5	0.189
	571.3	0.2313
	668.0	0.272
	781.2	0.3093
	913.6	0.3419
	1068.0	0.3696
	1249.0	0.3927
	1461.0	0.4117
	1709.0	0.4271
	1998.0	0.4394
	2337.0	0.449
	2733.0	0.4561
	3196.0	0.4609
	3737.0	0.4635
	4370.0	0.4639
	5111.0	0.4622
	5977.0	0.4585
	6989.0	0.4526
	8173.0	0.4448
	9558.0	0.435
	11180.0	0.4234
	13070.0	0.4101
	15290.0	0.3952
	17880.0	0.379
	20910.0	0.3617
	24450.0	0.3436
	28590.0	0.3248
	33430.0	0.3056
	39100.0	0.2863
	45720.0	0.267
	53470.0	0.248
	62530.0	0.2295
	73120.0	0.2115
	85510.0	0.1943

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 2.502
q = 1.191
mu = 1.655
epsilonL = 7.178e-05
Eth = 46.69

Fit range

E = 46.69 – 100000