{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 2.502, "q": 1.191, "mu": 1.655, "epsilonL": 7.178e-05, "Eth": 46.69}, "E_min": 46.69, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
46.69	0.0	
54.6	6.056e-05	
63.85	0.0002548	
74.67	0.0006673	
87.32	0.001441	
102.1	0.002798	
119.4	0.005075	
139.7	0.00877	
163.3	0.01458	
191.0	0.02343	
223.3	0.03646	
261.2	0.05485	
305.4	0.07955	
357.2	0.1109	
417.7	0.148	
488.5	0.189	
571.3	0.2313	
668.0	0.272	
781.2	0.3093	
913.6	0.3419	
1068.0	0.3696	
1249.0	0.3927	
1461.0	0.4117	
1709.0	0.4271	
1998.0	0.4394	
2337.0	0.449	
2733.0	0.4561	
3196.0	0.4609	
3737.0	0.4635	
4370.0	0.4639	
5111.0	0.4622	
5977.0	0.4585	
6989.0	0.4526	
8173.0	0.4448	
9558.0	0.435	
11180.0	0.4234	
13070.0	0.4101	
15290.0	0.3952	
17880.0	0.379	
20910.0	0.3617	
24450.0	0.3436	
28590.0	0.3248	
33430.0	0.3056	
39100.0	0.2863	
45720.0	0.267	
53470.0	0.248	
62530.0	0.2295	
73120.0	0.2115	
85510.0	0.1943	
-----