{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"46.69": {"P": 0}, "54.6": {"P": 6.056e-05}, "63.85": {"P": 0.0002548}, "74.67": {"P": 0.0006673}, "87.32": {"P": 0.001441}, "102.1": {"P": 0.002798}, "119.4": {"P": 0.005075}, "139.7": {"P": 0.00877}, "163.3": {"P": 0.01458}, "191.0": {"P": 0.02343}, "223.3": {"P": 0.03646}, "261.2": {"P": 0.05485}, "305.4": {"P": 0.07955}, "357.2": {"P": 0.1109}, "417.7": {"P": 0.148}, "488.5": {"P": 0.189}, "571.3": {"P": 0.2313}, "668.0": {"P": 0.272}, "781.2": {"P": 0.3093}, "913.6": {"P": 0.3419}, "1068.0": {"P": 0.3696}, "1249.0": {"P": 0.3927}, "1461.0": {"P": 0.4117}, "1709.0": {"P": 0.4271}, "1998.0": {"P": 0.4394}, "2337.0": {"P": 0.449}, "2733.0": {"P": 0.4561}, "3196.0": {"P": 0.4609}, "3737.0": {"P": 0.4635}, "4370.0": {"P": 0.4639}, "5111.0": {"P": 0.4622}, "5977.0": {"P": 0.4585}, "6989.0": {"P": 0.4526}, "8173.0": {"P": 0.4448}, "9558.0": {"P": 0.435}, "11180.0": {"P": 0.4234}, "13070.0": {"P": 0.4101}, "15290.0": {"P": 0.3952}, "17880.0": {"P": 0.379}, "20910.0": {"P": 0.3617}, "24450.0": {"P": 0.3436}, "28590.0": {"P": 0.3248}, "33430.0": {"P": 0.3056}, "39100.0": {"P": 0.2863}, "45720.0": {"P": 0.267}, "53470.0": {"P": 0.248}, "62530.0": {"P": 0.2295}, "73120.0": {"P": 0.2115}, "85510.0": {"P": 0.1943}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 2.502, "q": 1.191, "mu": 1.655, "epsilonL": 7.178e-05, "Eth": 46.69}, "E_min": 46.69, "E_max": 100000}}]}