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Plasma-Surface Interaction Data Set 182

Sputtering of D+ on C(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on C(pc) at 300 K

angle = 0.0 deg E /eV P
32.820.0002326
38.790.0006784
45.850.001385
54.190.002415
64.040.003811
75.690.005572
89.460.007625
105.70.009826
125.00.01199
147.70.01393
174.60.01553
206.30.01672
243.80.01749
288.20.01789
340.60.01796
402.60.01778
475.80.01738
562.40.01681
664.70.01613
785.60.01535
928.40.0145
1097.00.01362
1297.00.01271
1533.00.0118
1812.00.0109
2141.00.01002
2531.00.009174
2991.00.008364
3535.00.007597
4178.00.006875
4938.00.006201
5836.00.005577
6898.00.005
8153.00.004472
9636.00.003989
11390.00.00355
13460.00.003152
15910.00.002794
18800.00.002471
22220.00.002182
26260.00.001924
31040.00.001693
36690.00.001488
43360.00.001306
51250.00.001145
60570.00.001003
71590.00.0008769
84610.00.0007661

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 27.77 – 100000