{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on C(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 1.285, "q": 0.0539, "mu": 1.198, "epsilonL": 0.00224, "Eth": 27.77}, "E_min": 27.77, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
32.82	0.0002326	
38.79	0.0006784	
45.85	0.001385	
54.19	0.002415	
64.04	0.003811	
75.69	0.005572	
89.46	0.007625	
105.7	0.009826	
125.0	0.01199	
147.7	0.01393	
174.6	0.01553	
206.3	0.01672	
243.8	0.01749	
288.2	0.01789	
340.6	0.01796	
402.6	0.01778	
475.8	0.01738	
562.4	0.01681	
664.7	0.01613	
785.6	0.01535	
928.4	0.0145	
1097.0	0.01362	
1297.0	0.01271	
1533.0	0.0118	
1812.0	0.0109	
2141.0	0.01002	
2531.0	0.009174	
2991.0	0.008364	
3535.0	0.007597	
4178.0	0.006875	
4938.0	0.006201	
5836.0	0.005577	
6898.0	0.005	
8153.0	0.004472	
9636.0	0.003989	
11390.0	0.00355	
13460.0	0.003152	
15910.0	0.002794	
18800.0	0.002471	
22220.0	0.002182	
26260.0	0.001924	
31040.0	0.001693	
36690.0	0.001488	
43360.0	0.001306	
51250.0	0.001145	
60570.0	0.001003	
71590.0	0.0008769	
84610.0	0.0007661	
-----