{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "C", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"32.82": {"P": 0.0002326}, "38.79": {"P": 0.0006784}, "45.85": {"P": 0.001385}, "54.19": {"P": 0.002415}, "64.04": {"P": 0.003811}, "75.69": {"P": 0.005572}, "89.46": {"P": 0.007625}, "105.7": {"P": 0.009826}, "125.0": {"P": 0.01199}, "147.7": {"P": 0.01393}, "174.6": {"P": 0.01553}, "206.3": {"P": 0.01672}, "243.8": {"P": 0.01749}, "288.2": {"P": 0.01789}, "340.6": {"P": 0.01796}, "402.6": {"P": 0.01778}, "475.8": {"P": 0.01738}, "562.4": {"P": 0.01681}, "664.7": {"P": 0.01613}, "785.6": {"P": 0.01535}, "928.4": {"P": 0.0145}, "1097.0": {"P": 0.01362}, "1297.0": {"P": 0.01271}, "1533.0": {"P": 0.0118}, "1812.0": {"P": 0.0109}, "2141.0": {"P": 0.01002}, "2531.0": {"P": 0.009174}, "2991.0": {"P": 0.008364}, "3535.0": {"P": 0.007597}, "4178.0": {"P": 0.006875}, "4938.0": {"P": 0.006201}, "5836.0": {"P": 0.005577}, "6898.0": {"P": 0.005}, "8153.0": {"P": 0.004472}, "9636.0": {"P": 0.003989}, "11390.0": {"P": 0.00355}, "13460.0": {"P": 0.003152}, "15910.0": {"P": 0.002794}, "18800.0": {"P": 0.002471}, "22220.0": {"P": 0.002182}, "26260.0": {"P": 0.001924}, "31040.0": {"P": 0.001693}, "36690.0": {"P": 0.001488}, "43360.0": {"P": 0.001306}, "51250.0": {"P": 0.001145}, "60570.0": {"P": 0.001003}, "71590.0": {"P": 0.0008769}, "84610.0": {"P": 0.0007661}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 1.285, "q": 0.0539, "mu": 1.198, "epsilonL": 0.00224, "Eth": 27.77}, "E_min": 27.77, "E_max": 100000}}]}