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Plasma-Surface Interaction Data Set 176

Sputtering of 3He+ on B(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on B(pc) at 300 K

angle = 0.0 deg E /eV P
20.830.0
24.760.0002228
29.440.0008722
35.00.002177
41.610.004479
49.470.00818
58.810.01364
69.920.02097
83.120.02986
98.820.03952
117.50.04893
139.70.05721
166.00.06388
197.40.06882
234.70.07219
279.00.07422
331.70.07515
394.30.07518
468.80.07446
557.30.07312
662.60.07125
787.70.06893
936.50.06624
1113.00.06325
1324.00.06001
1574.00.05659
1871.00.05305
2224.00.04946
2644.00.04586
3144.00.0423
3737.00.03884
4443.00.03549
5282.00.03229
6280.00.02925
7466.00.02641
8875.00.02375
10550.00.02129
12540.00.01903
14910.00.01695
17730.00.01507
21080.00.01336
25060.00.01181
29790.00.01043
35420.00.009182
42110.00.008071
50060.00.007083
59510.00.006205
70750.00.005428
84110.00.004741

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 20.83 – 100000